英语语法分析

In order to reduce the thermal conductivity and heating capacity and increase the detectivity of array, the suspended structure was formed on silicon wafer by chemical etching of KOH.

为了降低热导和热容，提高探测器的探测灵敏度，用KOH作化学腐蚀完全去除了线性阵列下方的硅衬底，形成悬空结构。

When the probability of the photoelectrons produced by the detector is of Poisson or Gaussian distribution, the detectivity and false alarm probability of the signal are calculated respectively.

在探测器产生光电子的概率为泊松分布和高斯分布的情况下，分别对信号的探测率和虚警率进行了定量的计算。

The system can be used to measure the voltage responsivity and detectivity of infrared detector at different modulation frequency with rapid speed and high accuracy, it meets the need of measurement.

该系统可以自动测试不同调制频率下红外探测器的电压响应率和探测率，能够快速准确地完成测试任务，满足了测试要求。